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VLSI fabrication principles : silicon and gallium arsenide /

Ghandhi, Sorab K.

VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi. - New York : John Wiley and Sons, 1982. - X, 665 p. ; 24 cm. - A Wiley-Interscience publication . - A Wiley-Interscience publication .

Indice.

Bibliografía.

ISBN: 0-471-86833-7

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