Ghandhi, Sorab K. <br/><br/>
VLSI fabrication principles   : silicon and gallium arsenide /  
Sorab K. Ghandhi. 
 - New York :   John Wiley and Sons,   1982. 
 - X, 665 p. ;   24 cm. 
 - A Wiley-Interscience publication .
 - A Wiley-Interscience publication .
<br/><br/> Indice. 
<br/><br/>Bibliografía. 
<br/><br/><label>ISBN: </label>0-471-86833-7