TY  - BOOK
AU  - Ghandhi,Sorab K.
TI  - VLSI fabrication principles : : silicon and gallium arsenide / 
T2  - A Wiley-Interscience publication
SN  - 0-471-86833-7
PY  - 1982///
CY  - New York : 
PB  - John Wiley and Sons, 
N1  - Indice; Bibliografía
ER  -