000 00693nam a2200229 i 4500
001 71747
003 ES-MaACL
005 20230906171222.0
007 t|
008 040818s1982 xxu ||||1| eng d
020 _a0-471-86833-7
100 1 _aGhandhi, Sorab K.
_956551
245 1 0 _aVLSI fabrication principles
_b: silicon and gallium arsenide /
_cSorab K. Ghandhi.
260 _aNew York :
_bJohn Wiley and Sons,
_c1982.
300 _aX, 665 p. ;
_c24 cm.
490 1 _aA Wiley-Interscience publication
500 _aIndice.
504 _aBibliografía.
830 0 _aA Wiley-Interscience publication
_9231086
852 _aES-MaACL
_jL-11617
_bR.113370
999 _c71747
_d71747